Plasma Etching of Poly(dimethylsiloxane): Roughness Formation, Mechanism, Control, and Application in the Fabrication of Microfluidic Structures
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 1612-8850 |
| Author | Vlachopoulou, Maria-Elena, Kokkoris, George, Cardinaud, Christophe, Gogolides, Evangelos, Tserepi, Angeliki |
| Maintainer | CCSD |
| Last Updated | May 5, 2026, 14:08 (UTC) |
| Created | May 5, 2026, 14:08 (UTC) |
| Identifier | hal-00980549 |
| Language | en |
| contributor | Institute of Microelectronics (NCSR "Demokritos", IAMPPNM) ; National Center for Scientific Research "Demokritos" (NCSR) |
| creator | Vlachopoulou, Maria-Elena |
| date | 2013-05-05T00:00:00 |
| harvest_object_id | c1ba18b2-998c-40a6-abca-de36aae3bf39 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2024-04-11T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1002/ppap.201200008 |
| set_spec | type:ART |