Design, fabrication and control of a planar , non redondant, MEMS digital microrobot

With the current expansion of micro- and nano-technologies (in such domains as watchmaking, electronics,optics, biomedical, . . .), came the necessity to build systems able to manipulate and make the assembly ofsmaller and smaller objects. Design of robotic stations, able to manipulate micro-objects, expanded all over theworld, making use of high resolution actuators and numerous sensors adapted to the microworld.This thesis opens a new paradigm in the design of micromanipulation robotics. We present the design, modeling,fabrication and control of a new microrobot, the DiMiBot (Digital MicroroBot). It is the first digital microrobot— inspired from digital electronics — which makes use of binary actuators for the generation of discretedisplacements with high accuracy without any sensors (open-loop control). These highly repeatable and robustbinary actuators (bistable modules) generate an accurate displacement of 25 μm. They are monolithicallyconbined with a parallel flexible architecture, allowing the generation of a discrete workspace, in which all the2N (N is the number of bistable modules used) distinct reachable positions are perfectly stable, repeatable andmechanically robust. They are evenly spread inside a 10.5 μm length square.After dimensioning, the first digital microrobot prototype in silicon was microfabricated in MIMENTO clean-roomof FEMTO-ST institute. This DiMiBot has 4 bistable modules and generates a workspace of 3.5 μm resolutionwith 90 nm repeatability

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Source https://theses.hal.science/tel-00914595
Author Chalvet, Vincent
Maintainer CCSD
Last Updated May 7, 2026, 22:37 (UTC)
Created May 7, 2026, 22:37 (UTC)
Identifier NNT: 2013BESA2003
Language fr
Rights https://about.hal.science/hal-authorisation-v1/
contributor Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST) ; Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC) ; Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)
creator Chalvet, Vincent
date 2013-03-08T00:00:00
harvest_object_id 065b25f2-8677-4a7a-9da5-10dba40195af
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2026-03-31T00:00:00
set_spec type:THESE