-
Design, fabrication and control of a planar, non-redondant, MEMS digital micr...
With the current expansion of micro- and nano-technologies (in such domains as watchmaking, electronics, optics, biomedical, . . .), came the necessity to build... -
Design, fabrication and control of a planar , non redondant, MEMS digital mic...
With the current expansion of micro- and nano-technologies (in such domains as watchmaking, electronics,optics, biomedical, . . .), came the necessity to build systems...
