The plasma refining process studied in this work can efficiently remove boron fromsilicon. In combination with other processes one can purify silicon for solar cells atlow costs. The hot gases from the thermal plasma torch are blown onto the surface ofa silicon melt. However the chemistry at the silicon surface is so far poorlyunderstood. For a better understanding of the process we do parametricmeasurements of the boron removal rate, we calculate the chemical equilibriumconcentrations and we measure the temperature and radical concentrations in theplasma, using emission spectroscopy.The comparison of boron removal rates from literature to calculated chemicalequilibrium concentrations shows that the chemical reactions at the silicon surfaceare probably at chemical equilibrium. However, the boron to silicon ratio in theexhaust gases is higher than predicted by the chemical equilibrium calculations. Thisis probably due to the formation of a silica aerosol in the reactive boundary layer. Theresults of the parametric measurements of the boron removal rate agree also withthis theory.Several validation experiments showed that emission spectroscopy with Abelinversion can be used to measure the temperature and the concentration ratios O/Arand H/Ar in the plasma. The spectroscopic results helped to improve significantly anumerical mode. The results also showed that hydrogen diffuses strongly in theplasma while oxygen diffuses much less.
