Nanostrucuration and self-assembly of nano-objects for microelectronics application assited by FIB

The following works are base on the study of self assembly structures at the nanometric scale. At this scale the surface energy have a major impact in this organization. For a better understanding of this mechanism we studied different Silicon-Germanium base structures. We experimentally studied the crystalline or amorphous growth on different types of substrates (amorphous: SiO2, crystalline: Si or SOI). Some of these substrates were nano-structured using a focused ion beam using gallium source or gold-silicon source. In addition, we were able to use different surfaces such as TiO2 or porous silicon to study the organization of the material small size pore(less than 50nm).

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Source https://theses.hal.science/tel-00796428
Author Amiard, Guillaume
Maintainer CCSD
Last Updated May 13, 2026, 18:04 (UTC)
Created May 13, 2026, 18:04 (UTC)
Identifier tel-00796428
Language fr
Rights https://about.hal.science/hal-authorisation-v1/
contributor NSE ; Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP) ; Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)
creator Amiard, Guillaume
date 2012-12-07T00:00:00
harvest_object_id 2e0e3524-49e2-49c4-ba8f-a7b59a1d5c2d
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2024-06-10T00:00:00
set_spec type:THESE