Piezoelectric materials utilisation for hybrid and monolithic integration of transformers

Works presented in this report concerns the problems of electric devices integration in general and passive components integration in particular aiming to carry out the realization of integrated conversion systems. In a first part, the study and the characterization of piezoelectric transformers exhibiting millimetre-length is tackled for supply of fractions of Watts to few Watts applications. This transformer is well adopted to MOSFET & IGBT gate drive circuits integrated on a PCB substrate. This application is fully detailed in the report. In a second part, we have been interested in the problem of integration of piezoelectric micro-transformers in a silicon substrate for supplying micro-systems. We have been proposed new micro-transformer structure realized with AlN and PZT thin layers deposed by sputtering. These manufacturing process are compatible with silicon technologies and with the constraints of micro-machining. An original prototype has been realized and characterized.

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Source https://theses.hal.science/tel-00789774
Author Vasic, Dejan
Maintainer CCSD
Last Updated May 14, 2026, 10:05 (UTC)
Created May 14, 2026, 10:05 (UTC)
Identifier tel-00789774
Language fr
Rights https://about.hal.science/hal-authorisation-v1/
contributor Systèmes et Applications des Technologies de l'Information et de l'Energie (SATIE) ; École normale supérieure - Cachan (ENS Cachan)-Université Paris-Sud - Paris 11 (UP11)-Institut Français des Sciences et Technologies des Transports, de l'Aménagement et des Réseaux (IFSTTAR)-École normale supérieure - Rennes (ENS Rennes)-Université de Cergy Pontoise (UCP) ; Université Paris-Seine-Université Paris-Seine-Conservatoire National des Arts et Métiers [Cnam] (Cnam)-Centre National de la Recherche Scientifique (CNRS)
creator Vasic, Dejan
date 2003-06-26T00:00:00
harvest_object_id 8830ee3b-92ae-4918-a63d-c69ec547ee16
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2025-08-12T00:00:00
set_spec type:THESE