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A parabolic free boundary problem modeling electrostatic MEMS
The evolution problem for a membrane based model of an electrostatically actuated microelectromechanical system (MEMS) is studied. The model describes the dynamics of... -
Multiphysic characterization and modelling of superconducting MEMS for radio ...
Superconducting MEMS were developed by IRAM for millimetre wave heterodyne receivers improvements. In this report, the characterization of these capacitive MEMS is... -
Numerical and analytical modelling of holed MEMS resonators
International audience -
Electromechanical properties of multiwalled carbon nanotubes
Cette thèse de 130 pages a été reproduite en 50 exemplaires au format 17x25 cm. Ceux qui seraient intéressé par un de ces exemplaires peuvent en faire la demande par email à... -
La CAO et l'optimisation de systèmes, une approche par couplages dynamiques d...
C'est au travers d'un panel d'applications de conception en génie électrique, issu de mes travaux de recherche et d'encadrements doctoraux, qu'est illustrée une... -
Microcapteurs résonants et électroniques associées : modélisation conjointe e...
Considering MEMS used for inertial navigation, we distinguish vibrating beam accelerometers (VBA) and Coriolis effect based gyroscopes (Coriolis Vibrating Gyroscopes,... -
Selective nucleation in silicon moulds for diamond MEMS fabrication
International audience -
New technologies of diamond MEMS sensors for transducers applications
Diamond material is very promising for future technological applications due to its outstanding physical and chemical properties. In particular, its remarkable... -
Tactile Display Devices Based on Magnetic Micro-Electro-Mechanical Systems (M...
Tactile display devices are systems bound to provide a tactile feedback to their users. They improve human-machine interfaces in the fields of virtual or augmented... -
MEMS ACTUATORS AND RESONATORS : APPLICATIONS TO NANO-CHARACTERIZATION
My research activities have covered since 1996 the fields of nanosciences, semi-conductor physics, micro and nanotechnologies and MEMS/NEMS... -
Modelling of wide frequency range piezoresistive MEMS microphone
International audience -
Elaboration of a capacitive transducer for vibration-to-electricity power con...
A relevant solution to power isolated sensors is to harvest the energy available in their immediate environment. Among the possible sources of energy, our choice was... -
Ultra wideband transposer integrated continuously tunable from 1-20 GHz, usin...
This thesis deals with the realisation of a frequency transposition block from 1 to 20 GHz based on MEMS components. It results in the design and fabrication of a new... -
Piezoelectric materials utilisation for hybrid and monolithic integration of ...
Works presented in this report concerns the problems of electric devices integration in general and passive components integration in particular aiming to carry out... -
Dynamics of a free boundary problem with curvature modeling electrostatic MEMS
The dynamics of a free boundary problem for electrostatically actuated microelectromechanical systems (MEMS) is investigated. The model couples the electric potential... -
Study of a piezoelectric bulk acoustic wave resonator in thin film technology
The studied resonator is part of an industrial project carried by NXP Semiconductors. The objective is the realization of a integrable RF MEMS resonator in order to... -
Sign-Preserving Property for Some Fourth-Order Elliptic Operators in One Dime...
For a class of one-dimensional linear elliptic fourth-order equations with homogeneous Dirichlet boundary conditions it is shown that a non-positive and non-vanishing... -
A MEMS piezoelectric vibration energy harvesting device
This paper presents the design and fabrication of a piezoelectric micro power generator to be used as a power source for a wireless sensor node. The device scavenges... -
High Frequency BAW resonators in MEMS technology on Silicon Wafer
Nowadays, various competitions between manufacturers take place in the field of MEMS (Micro- Electro-Mechanical Systems), due to the quest for continuous performance...
