Ultra wideband transposer integrated continuously tunable from 1-20 GHz, using the technology of silicon micro-machined in a perspective of extremely low power consumption (few mW)

This thesis deals with the realisation of a frequency transposition block from 1 to 20 GHz based on MEMS components. It results in the design and fabrication of a new kind of tuneable RF MEMS capacitor based on a rotational gyroscope structure for the actuation part and on a surface variation for the capacitance change. Compared to other architectures published, this structure presents the advantage to have an actuation part (the MEMS part) and a RF part (the capacitor) that are electrically separated in order to avoid the phenomenon of self-actuation with RF signal crossing power. Another advantage of this structure is the possibility to simultaneously tune 8 different capacitors on a single chip, with only one actuation system. The fabrication of the chips requires the use of a SOI wafer for the MEMS part and a glass wafer for the RF part, which offers on chip packaging opportunity. This work also focused on the study of the pull-in effect in the case of curved comb-drives, highlighting the most critical physical parameters for the design. This parametric study has been used to improve the actuation structure and more particularly the topology of the curved comb-drives by variation of the finger width and gap. These modifications were done in order to push the pull-in effect out of the actuation operating range. This new tuneable capacitor has been integrated into a simple VCO circuit on alumina to validate the RF performances and could be associated to a RF mixer in order to realize the full frequency transposition block

Data and Resources

Additional Info

Field Value
Source https://theses.hal.science/tel-00786366
Author Pagazani, Julien
Maintainer CCSD
Last Updated May 14, 2026, 14:42 (UTC)
Created May 14, 2026, 14:42 (UTC)
Identifier NNT: 2012PEST1098
Language fr
Rights https://about.hal.science/hal-authorisation-v1/
contributor Electronique, Systèmes de communication et Microsystèmes (ESYCOM) ; Conservatoire National des Arts et Métiers [Cnam] (Cnam)-Université Paris-Est Marne-la-Vallée (UPEM)-ESIEE Paris
creator Pagazani, Julien
date 2012-06-05T00:00:00
harvest_object_id eae16548-cd59-4a4c-9f66-57c32253d068
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2026-03-31T00:00:00
set_spec type:THESE