Tactile display devices are systems bound to provide a tactile feedback to their users. They improve human-machine interfaces in the fields of virtual or augmented reality. This report deals with the contribution of magnetically actuated micro-electro-mechanical systems (MEMS) to the elaboration of easily integrable tactile display devices.A state of the art of actuation techniques used in existing devices is proposed, along with a requirements analysis for tactile applications. Magnetostatic actuation was considered for these needs.First tactile display device prototypes are designed as a network of 4x4 hybrid elastomeric micro-actuators with a 2 mm pitch, and combined microfabrication and conventional fabrication techniques.The conception and elaboration of these micro-actuators is detailed. High vibration amplitudes can be reached using pulse actuation (up to 200 µm), with instantaneous forces of 32 mN per actuator. Sensitive tests were also achieved in order to confirm their efficiency.Micro-coils were also developed in order to fulfill the magnetic micro-actuators needs, and meet the requirements for tactile display devices. Various micro-coil configurations suitable for power actuation are proposed and elaborated by electrodeposition. Micro-actuators based on elastomeric membranes were fabricated and characterized. The contribution of these micro-coils for micro-actuation is discussed face with hybrid approaches
