System architecture and circuit design for micro and nanoresonators-based mass sensing arrays

The PhD project focuses on micro or nanomechanical resonators and their surrounding electronics environment. Mechanical components are employed to sense masses in the attogram range (10−18 g) or extremely low gas concentrations. The components can then be implemented in arrays in order to construct cutting-edge mass spectrometers or gas chromatographs. To reach the necessary resolutions, a harmonic detection of resonance technique is employed that measures the shift of the resonant frequency of a tiny mechanical structure due to an added mass or a gas adsorption. The need of shrinking the resonator's dimensions to enhance the sensitivity also reduces the signal delivered by the component. The resonator low output signal requires employing new electromechanical resonator topologies and electronic architectures that minimize the noise, the parasitic couplings and that can be implemented in arrays.

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Source https://theses.hal.science/tel-00658843
Author Arndt, Grégory
Maintainer CCSD
Last Updated May 9, 2026, 12:33 (UTC)
Created May 9, 2026, 12:33 (UTC)
Identifier NNT: 2011PA112358
Language en
Rights https://about.hal.science/hal-authorisation-v1/
contributor Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI) ; Direction de Recherche Technologique (CEA) (DRT (CEA)) ; Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)
creator Arndt, Grégory
date 2011-12-12T00:00:00
harvest_object_id 2515fcfb-a16c-4ce7-b46f-3fc0d50c9eab
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2026-03-30T00:00:00
set_spec type:THESE