High temperature chemical vapor deposition of aluminum nitride, growth and evaluation
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | European Conference on Chemical Vapor Deposition, EUROCVD19 |
| Author | Pons, M., Boichot, R., Coudurier, N., Claudel, A., Blanquet, E., Lay, S., Mercier, Florian, Pique, D. |
| Maintainer | CCSD |
| Last Updated | May 6, 2026, 10:06 (UTC) |
| Created | May 6, 2026, 10:06 (UTC) |
| Identifier | hal-00946648 |
| Language | en |
| contributor | Science et Ingénierie des Matériaux et Procédés (SIMaP) ; Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS) |
| coverage | Varna, Bulgaria |
| creator | Pons, M. |
| date | 2013-05-06T00:00:00 |
| harvest_object_id | 5b75dcf9-12ef-479e-a90e-3aad99f9379c |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-09-27T00:00:00 |
| set_spec | type:COMM |