High temperature chemical vapor deposition of...
URL: https://hal.science/hal-00946648
Dataset description:
International audience
Source: High temperature chemical vapor deposition of aluminum nitride, growth and evaluation
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Additional Information
| Field | Value |
|---|---|
| Data last updated | unknown |
| Metadata last updated | May 6, 2026 |
| Created | unknown |
| Format | HTML |
| License | No License Provided |
| Created | 5 months ago |
| Id | df3616da-d046-40f0-b8f4-5c276252447b |
| Package id | oai-hal-hal-00946648v1 |
| Resource type | HTML |
| State | active |