On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri-Isopropoxide Studied by FTIR Spectroscopy
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0863-1042 |
| Author | Hübner, Marko, Fröhlich, Maik, Tawidian, Hagop, Mikikian, Maxime, Röpcke, Jürgen, Kersten, Holger |
| Maintainer | CCSD |
| Last Updated | May 7, 2026, 02:47 (UTC) |
| Created | May 7, 2026, 02:47 (UTC) |
| Identifier | hal-00942271 |
| Language | en |
| contributor | Leibniz Institute for Plasma Science and Technology (INP) ; Leibniz Association = Leibniz Gemeinschaft = Wissenschaftsgemeinschaft Gottfried Wilhelm Leibniz (LG / WGL) |
| creator | Hübner, Marko |
| date | 2014-05-07T00:00:00 |
| harvest_object_id | bc856be6-b4c1-444a-a823-820573164a98 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-12-14T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1002/ctpp.201310065 |
| set_spec | type:ART |