On the Plasma Chemistry of an RF Discharge...
URL: https://hal.science/hal-00942271
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| Field | Value |
|---|---|
| Data last updated | unknown |
| Metadata last updated | May 7, 2026 |
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| Format | HTML |
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| Created | 5 months ago |
| Id | 44865105-b99a-4b05-92c6-0dbcd9ddb780 |
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| Resource type | HTML |
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