Low temperature plasma deposition of silicon thin films: From amorphous to crystalline
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0022-3093 |
| Author | Roca I Cabarrocas, Pere, Cariou, Romain, Labrune, Martin |
| Maintainer | CCSD |
| Last Updated | May 11, 2026, 19:59 (UTC) |
| Created | May 11, 2026, 19:59 (UTC) |
| Identifier | hal-00806450 |
| Language | en |
| Rights | https://about.hal.science/hal-authorisation-v1/ |
| contributor | Laboratoire de Physique des Interfaces et des Couches Minces (LPICM) ; École polytechnique (X) ; Institut Polytechnique de Paris (IP Paris)-Institut Polytechnique de Paris (IP Paris)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Roca I Cabarrocas, Pere |
| date | 2012-02-01T00:00:00 |
| harvest_object_id | 73a6aaec-0b65-4926-b1e7-20c489d13e64 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-11-21T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1016/j.jnoncrysol.2011.12.113 |
| set_spec | type:ART |