Modeling of inductively coupled plasma Ar/Cl-2/N-2 plasma discharge: Effect of N-2 on the plasma properties.
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0734-2101 |
| Author | Chanson, Romain, Rhallabi, A., Fernandez, Marie-Claude, Cardinaud, Christophe, Landesman, Jean-Pierre |
| Maintainer | CCSD |
| Last Updated | May 11, 2026, 21:51 (UTC) |
| Created | May 11, 2026, 21:51 (UTC) |
| Identifier | hal-00806036 |
| Language | en |
| contributor | Institut des Matériaux Jean Rouxel (IMN) ; Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST) ; Université de Nantes (UN)-Université de Nantes (UN)-Ecole Polytechnique de l'Université de Nantes (EPUN) ; Université de Nantes (UN)-Université de Nantes (UN)-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Chanson, Romain |
| date | 2013-01-11T00:00:00 |
| harvest_object_id | 16656089-6956-4a26-bb6a-f0ee216c1c8d |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2024-04-11T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1116/1.4766681 |
| set_spec | type:ART |