Towards Bayesian Network Methodology for Predicting the Equipment Health Factor of Complex Semiconductor Systems
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0020-7543 |
| Author | Bouaziz, Mohammed Farouk, Zamaï, Éric, Duvivier, F. |
| Maintainer | CCSD |
| Last Updated | May 14, 2026, 18:28 (UTC) |
| Created | May 14, 2026, 18:28 (UTC) |
| Identifier | hal-00783734 |
| Language | en |
| contributor | Gestion et Conduite des Systèmes de Production (G-SCOP_GCSP) ; Laboratoire des sciences pour la conception, l'optimisation et la production (G-SCOP) ; Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Bouaziz, Mohammed Farouk |
| date | 2013-06-27T00:00:00 |
| harvest_object_id | bf80c8e3-12fc-4c7a-a2bf-9e18657ffa97 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-09-27T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1080/00207543.2013.775525 |
| set_spec | type:ART |