Modelling of wide frequency range piezoresistive MEMS microphone
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | Proc. of 11th Int. Workshop on Micromachined Ultrasonic Transducers |
| Author | Ekeom, D., Rufer, Libor |
| Maintainer | CCSD |
| Last Updated | May 15, 2026, 10:01 (UTC) |
| Created | May 15, 2026, 10:01 (UTC) |
| Identifier | hal-00772809 |
| Language | en |
| contributor | Microsonics ; privé |
| coverage | Tours, France |
| creator | Ekeom, D. |
| date | 2012-06-06T00:00:00 |
| harvest_object_id | 3c2d3a8c-f907-4965-9436-3ae0ff8f6fad |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-03-26T00:00:00 |
| set_spec | type:COMM |