Dielectric oxynitride LaTiO<sub>x</sub>N<sub>y</sub> thin films deposited by reactive radio-frequency sputtering
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0040-6090 |
| Author | Ziani, Ahmed, Le Paven-Thivet, Claire, Fasquelle, Didier, Le Gendre, Laurent, Benzerga, Ratiba, Tessier, Franck, Cheviré, François, Carru, Jean-Claude, Sharaiha, Ala |
| Maintainer | CCSD |
| Last Updated | May 20, 2026, 05:43 (UTC) |
| Created | May 20, 2026, 05:43 (UTC) |
| Identifier | hal-00693204 |
| Language | en |
| contributor | Institut d'Electronique et de Télécommunications de Rennes (IETR) ; Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes) ; Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Ziani, Ahmed |
| date | 2012-05-01T00:00:00 |
| harvest_object_id | 4c3c8288-beeb-460d-9ae6-a84d97e65a6e |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-12-05T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1016/j.tsf.2011.10.192 |
| set_spec | type:ART |