Decision making based on the EHF integration in a complex semiconductor manufacturing

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Source 12th European Advanced Process Control and Manufacturing Conference (APCM 2012)
Author Bouaziz, Mohammed Farouk, Sahnoun, M'Hammed, Zamaï, Éric, Hubac, S.
Maintainer CCSD
Last Updated May 21, 2026, 12:27 (UTC)
Created May 21, 2026, 12:27 (UTC)
Identifier hal-00688997
Language en
contributor Gestion et Conduite des Systèmes de Production (G-SCOP_GCSP) ; Laboratoire des sciences pour la conception, l'optimisation et la production (G-SCOP) ; Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS)
coverage MINATEC Grenoble,, France
creator Bouaziz, Mohammed Farouk
date 2012-04-16T00:00:00
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metadata_modified 2025-09-27T00:00:00
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