Quality and exposure control in semiconductor manufacturing. Part I: Modelling
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0020-7543 |
| Author | Bettayeb, Belgacem, Bassetto, Samuel, Vialletelle, Philippe, Tollenaere, Michel |
| Maintainer | CCSD |
| Last Updated | May 25, 2026, 13:38 (UTC) |
| Created | May 25, 2026, 13:38 (UTC) |
| Identifier | hal-00677042 |
| Language | en |
| contributor | Système d’Information, conception RobustE des Produits (G-SCOP_SIREP) ; Laboratoire des sciences pour la conception, l'optimisation et la production (G-SCOP) ; Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Bettayeb, Belgacem |
| date | 2012-05-25T00:00:00 |
| harvest_object_id | d7711eb8-0c2c-4712-94ac-16bf22d1ccc5 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-09-27T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1080/00207543.2011.630042 |
| set_spec | type:ART |