Investigation of the thermal stability of Mg/Co periodic multilayers for EUV applications

Published in Applied Physics A: Materials Science & Processing Published at http://www.springerlink.com.chimie.gate.inist.fr/content/6v396j6m56771r61/ 21 pages

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Source ISSN: 0947-8396
Author Hu, M.-H., Le Guen, K., André, Jean-Michel, Zhou, S.-K., Li, H.-C., Zhu, J.-T., Wang, Z.-S., Meny, C., Mahne, N., Giglia, Angela, Nannarone, S., Esteve, I., Walls, M., Jonnard, Philippe
Maintainer CCSD
Last Updated November 6, 2026, 16:00 (UTC)
Created November 6, 2026, 16:00 (UTC)
Identifier hal-00648899
Language en
Rights https://about.hal.science/hal-authorisation-v1/
contributor Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR) ; Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS)
creator Hu, M.-H.
date 2011-12-06T00:00:00
harvest_object_id 3e1d3de7-d45e-433b-a3b3-270d4354fef3
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2026-10-30T00:00:00
relation info:eu-repo/semantics/altIdentifier/arxiv/1112.1292
set_spec type:ART