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Tags:
euv-reflectivity
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The chemical characterization and reflectivity of the Al(1.0%wtSi)/Zr periodi...
The reflectivity of Al(1.0%wtSi)/Zr multilayer with 40 periods has been measured in the region of 17nm-19nm. Experimental peak reflectivity is 41.2% at 5° incidence...
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