Sub-surface modification of silicon using ultrashort lasers on periodically pre-structured samples
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | E-MRS 2014 |
| Author | Derrien, J.Y., Torres, R., Grojo, D., Itina, Tatiana, Sarnet, Thierry |
| Maintainer | CCSD |
| Last Updated | May 5, 2026, 09:53 (UTC) |
| Created | May 5, 2026, 09:53 (UTC) |
| Identifier | ujm-00998744 |
| Language | en |
| contributor | Laboratoire Lasers, Plasmas et Procédés photoniques (LP3) ; Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS) |
| coverage | Lille, France |
| creator | Derrien, J.Y. |
| date | 2014-05-26T00:00:00 |
| harvest_object_id | 6cced519-2048-4737-aa09-9d91bc169f7c |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-04-23T00:00:00 |
| set_spec | type:COMM |