The use of coatings and thin layers deposited on substrates is highly sought in many applications. The objectives of these coatings and deposits are multiple (improve the durability of structures, their wear resistance and fatigue, etc.). On the other hand, gradient materials are being developed to meet new functional requirements, such as a better resistance to temperature, wear and corrosion. For all of these applications, the characterization of these coatings and gradient materials, in order to determine their properties (thickness, elastic constants, adherence, residual stresses, etc…), is decisive for the health control of pieces and for their optimum operation during their use. To characterize these structures, wechose to exploit the dispersion of surface acoustic waves over a wide frequency range (10 to 60 MHz).To excite these waves, SAW-IDT MEMS sensors have been carried out at different frequencies covering the entire frequency range we considered. The quasi-harmonic excitation was preferred to obtain accurate measures of phase velocities. We showed the potential of this approach by characterizing, first, thin layers structures (500 nm) and second, amorphous structures with a stressesgradient.
