The graphene, a basic sheet of graphite, is a new material intensively studied by the scientific community because of its new and unique physical properties. Furthermore it appears as a very promising material for technological applications. We present a study of structural and electronic properties of epitaxial graphene on 6H-SiC(0001) using a combined STM/AFM microscope based on a quartz tuning fork with a conductive tip. The tips made from electrochemical etched Pt/Ir wire or carbon fiber have an apex radius of few nanometers and were characterized by SEM, TEM and by field electron emission. First, we focused on the properties of a sample showing terraces partially covered with graphene. In this case, the STM images do not provide the real surface topography, which is given by the AFM topography working in repulsive mode. The electronic properties of each terrace are confirmed by local spectroscopic I=f(V) measurements. Then, the high-resolution FM-AFM study on a smooth terrace revealed the corrugated structure due to the periodic 6√3x6√3R30° reconstruction of SiC (0001) covered with graphene. We show that the maxima of the local density of electronic states at the Fermi level observed in STM image do not overlap with the zones associated with maxima of total states density (AFM Topography). They appear shifted by ~1 nm along the direction [11] of the 6x6 nanomesh of the 6√3x6√3R30° reconstruction. As the corrugation amplitude of the surface increases with the applied force gradient, we show that the surface of graphene is distorted by the AFM tip. This deformation modifies the electronic coupling between the graphene and the buffer layer and strongly influences the contrast in STM/AFM images. The consequences of this deformation are also discussed in the STM images showing the lattice of graphene.
