The objective of this thesis is to study the formation of carbonaceous nanoparticles in a low pressure plasma. Dust particles are created by sputtering a polymer layer deposited on the bottom electrode of a capacitively coupled radio-frequency discharge. The presence of dust particles disturbs and changes the plasma properties. The growth of dust particles can trigger low frequency instabilities that evolve with the dust particle size and density. In the center of the discharge, the void, a dust-free region, is observed. It is characterized by an enhanced luminosity. Di fferent diagnostics (electrical measurements, high speed imaging, Laser Induced Fluorescence) are used in order to understand these di fferent behaviors resulting from plasma-dust particle interactions. Dust particle growth instabilities are investigated showing the existence of diff erent instability regimes. Their main characteristics are extracted such as their duration and their evolution frequency. These instabilities are characterized by the formation of small plasma spheroids moving and interacting in the discharge. Several interesting phenomena are evidenced such as the merging and splitting of these plasma spheroids. Concerning the void, our investigations confi rmed the high excitation occurring in this region. In the last part of the thesis, the dissociation of aluminium triisopropoxide (ATI) is studied in a plasma using Fourier Transform InfraRed spectroscopy. Thanks to this diagnostic, the evolution of ATI density has been studied as a function of the discharge parameters. We have also quanti fied the di fferent hydrocarbon compounds formed by polymerization.
