This thesis fits into the development of an automated Injection Medical Device (IMD) in which is integrated a micropump in silicon technology. The heart of this micropump is constituted by an actuated membrane which moves a volume of liquid through microfluidic channels. Two types of actuated membranes were studied: a membrane with an integrated bimetallic actuator and a membrane with an external piezoelectric actuator. FEM simulations enabled the refinement of existing theoretical models and a better representation of nonlinear effects that govern the mechanics of such membranes. An optimization method specially putted in place enabled the computation of optimal geometric configurations according to the targeted functioning ranges. Some membranes were then fabricated in cleanroom. Their mechanical characteristics were measured and compared to predictions of FEM simulations.
