Silicon solar cells still require cost reduction and improved efficiency to become more competitive. New architectures can provide a significant increase in efficiency, but today most of the approaches need additional fabrication steps. In this context, laser processing offers a unique way to replace technological steps like photolithography that is not compatible with the requirements of the photovoltaic industry. This PhD thesis will present two promising laser processes for silicon solar cells: selective laser doping and selective laser ablation. Laser-assisted diffusion of dopants is a promising way to produce at low cost advanced silicon solar cells with high efficiency. Indeed, selective emitters, which rely on high dopant concentration localized under the front electrical contacts are an effective way to reduce power losses at the front surface of silicon solar cells. Several laser-based techniques are competing to optimise the emitter geometry. One of the main approaches is to take advantage of the doping glass (usually P2O5 for p-type silicon solar cells) that is formed during the standard diffusion process. Selective laser ablation is an effective way to open the antireflection layer (SiNx) in order to perform alternative front side metallization. Indeed, in the industrial production of standard silicon solar cells, the front side metallization is made by screen printing of metal paste. This process scheme is very cost efficient but it leads to serious limitations of the solar cell efficiency. Electrochemical metallization avoids these issues but requires a selective opening of SiNx, which is usually done by photolithography. Direct laser ablation allows to consider this approach at an industrial level. These processes are presented illustrated by research conducted during this PhD at INL in laser technologies for photovoltaics. An innovative and potentially self-aligned process is also discussed, where the laser is used to open locally the antireflection and passivation coating, and at the same time, achieve local phosphorus diffusion. Moreover solar cells results above 18% have been obtained thanks to a selective emitter structure achieved with selective laser doping.
