Laser ablation is widely spread for solid sample microanalysis. A tightly focused laser beam allows direct sampling of matter, the ablated mass can then be analysed either with LIBS (Laser Induced Breakdown Spectroscopy) or with an inductively coupled plasma source combined with an optical emission spectrometer (ICP-AES) or a mass spectrometer (ICP-MS). With spatial resolution down to the micron scale, laser ablation techniques permit local elemental analysis of sample surface. Nevertheless, analytical performances of such techniques could be improved by combining LIBS and ICP information to understand and control laser/matter interaction. For this purpose, this work aimed to develop a microanalytical technique based on laser ablation coupled to simultaneous detection with LIBS and ICP to study analytical potentialities of such technique for elemental mapping of material surface. Performances and limitations of the system were studied on one hand, by characterizing laser-induced aerosols and on the other hand, by studying simultaneous LIBS and ICP signals. Elemental fractionation on critical matrices such as brass was evidenced in microablation despite a different laser/matter interaction compared with macroablation. A correction procedure a posteriori using the total extraction efficiency of the ablation cell was proposed to overcome this problem for quantitative analysis. An ablation cell, optimized from a numerical simulation study, was developed for mapping applications. Analytical performances were evaluated in terms of stability (8-10 %), spatial resolution (5 µm) and detection limits (in the ppm range with ICP-MS). The LIBS and ICP complementarity makes the double detection system a diagnostic tool for laser/matter interaction and an analytical instrument allowing simultaneous monitoring of traces and majors from a large element range of the periodic classification
