The work deals with the integration of passive components for the conversion and storage of energy in the general context of portable electronic devices. The development of micro-electronics lead to the miniaturization of electronic circuits, pushing the expansion of portable electronic devices usage (smart phones, tablets, digital cameras pictures ... etc) and the emergence of networks of communicating sensors for ambient intelligence. One of the challenges of the coming years is to meet the ever-increasing number of functionalities and provide energy autonomy for these different objects. Miniaturization and 3D heterogeneous integration approach are solutions to overcome the technological barriers and address these issues. In power circuits providing conversion and energy management, the size of converters is defined by the size of passive elements. I will present the work carried out since 2005 at LAAS-CNRS for the integration of passive components (coils, capacitors) on silicon dedicated to energy management circuits. The work focuses on the design, development of topologies and technologies for micro-coils (L) and integrated capacitors (C). For highdensity capacitors (above 500 nF.mm-2), silicon etching technologies were explored associated with the synthesis of high-k materials. Regarding micro-coils, to reach specifications defined by low power converters, developments mainly concern the integration of magnetic core and technologies for depositing thick insulation and metal layers. In the long term, to produce power supply on-chip, stacking of multi-functional chips are desired. We will show some ways of integration: passive chip, or passive-active co-integration. In a second part, we will discuss the energy autonomy of microsystems (sensors or other). Many research has emerged since the early 2000s around microsystems harvesting ambient energy: solar, thermal, mechanical, acoustic. Since the harvested energy is intermittent, there is the need for a buffer energy storage. In this case, the best solution is to use a supercapacitor storage element which has almost unlimited lifetime. I will present the research activities related to the integration of micro-supercapacitors on silicon. The first devices based on activated carbon and other nanostructured carbons showed very interesting performance: 250 mJ.cm-2 in energy and 200 mW.cm-2 in power respectively. Finally, research perspectives will be proposed and discussed.
