The HVPE process for the growth of III-V semiconductor nanowires

This thesis is devoted to the study of HVPE (Hydride Vapour Phase Epitaxy) method of growing GaN and GaAs nanowires with and without catalyst. A systematic study of the influence of the growth conditions on GaN formation was performed in order to demonstrate the feasibility of this growth on c-plane sapphire and silicon substrates without preliminary treatment of the surface. We have demonstrated by VLS-HVPE the growth of the GaN nanowires with constant diameters of 40 to 200 nm and of length up to 60 μm, while they possess remarkable optical and crystal quality. The newly observed stability of the zinc blende structure for GaAs nanowires with diameters of 10 nm has been described by the VLS-HVPE process, for lengths of few tens of micrometers. The growth mechanisms are discussed based on the phase diagram and the physics of near-equilibrium HVPE using chloride precursors. For III-V semiconductors, the study allows us to consider applications related to long nanowires that, at present, are used only for silicon. This work shows that in the context of Nanoscience, the fast growth HVPE method deserves a wider audience and thus could be considered as an effective complementary tool to MOVPE and MBE processes for the controlled shaping of matter on the nanoscale.

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Source https://theses.hal.science/tel-00844400
Author Lekhal, Kaddour
Maintainer CCSD
Last Updated May 10, 2026, 08:48 (UTC)
Created May 10, 2026, 08:48 (UTC)
Identifier NNT: 2013CLF22339
Language fr
Rights https://about.hal.science/hal-authorisation-v1/
contributor Institut Pascal (IP) ; Université Blaise Pascal - Clermont-Ferrand 2 (UBP)-SIGMA Clermont (SIGMA Clermont)-Centre National de la Recherche Scientifique (CNRS)
creator Lekhal, Kaddour
date 2013-02-18T00:00:00
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harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2026-03-31T00:00:00
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