Glutamic acid and especially its associated glutamate ion are additives widely used as food flavor enhancers as well as main markers of the japanese taste "umami". However, excess consumption may be responsible for brain disorders causing sweats, headaches, losses of balance, faints and pains. Thus, it became important to develop methods in order to analyze glutamate ions in liquid phase and to integrate them in order to realize glutamate-sensitive microsensors. Works are therefore dedicated to the glutamate-sensitive enzymatic field effect transistors (EnFET) development, dealing with the pH-ChemFET mass fabrication using "Silicon & Polymers" technologies, their packaging for the measurement in liquid phase, the glutamate-EnFET modeling, the integration of glutamate oxidase enzymatic layer, and the characterization of the pH-ChemFET and glutamate-EnFET microsensors. They intend to achieve the integration of glutamate-EnFET into an electronic masticator developed by the laboratory FLAVIC-INRA in Dijon. In parallel a new concept microsensor named ElecFET was designed. This new concept combines amperometric and potentiometric detection techniques to the microscale. The different technological steps have been completed and ElecFETs chips were manufactured in the LAAS-CNRS technological platform. We validated this new concept first by studying the water electrolysis. Then, the parameters that influence the microsensor response were discussed. Finally, we applied this new concept to the detection of hydrogen peroxide, glucose and glutamate.
