Microcapteurs chimiques à base de micropoutres en silicium modifiées à l'aide dematériaux inorganiques microporeux

In order to optimize the use of microcantilever in the way of chemical sensing, microporous sensitive coatings have been tried to detect ethanol, toluene and humidity. The use of microcantilever without sensitive coating have been performed and simple models has been made and permit to predict the response of microcantilever in different environments. These studies rely on the use of microcantilever within two different detection mode : the detection of mass variation of the sensor because of the sorption of species in sensitive coating ; and the detection of the change of physical properties of the fluid.

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Additional Info

Field Value
Source https://theses.hal.science/tel-00684171
Author Tétin, Sébastien
Maintainer CCSD
Last Updated May 23, 2026, 00:40 (UTC)
Created May 23, 2026, 00:40 (UTC)
Identifier tel-00684171
Language fr
Rights https://about.hal.science/hal-authorisation-v1/
contributor Laboratoire de l'intégration, du matériau au système (IMS) ; Université de Bordeaux (UB)-Institut Polytechnique de Bordeaux-Centre National de la Recherche Scientifique (CNRS)
creator Tétin, Sébastien
date 2009-12-14T00:00:00
harvest_object_id d96f7833-ad35-4499-a3e2-865429b59299
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2025-03-17T00:00:00
set_spec type:THESE