Porous Si as a substrate material for RF passive integration

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Source 14th International Conference on Ultimate Integration on Silicon, ULIS2013
Author G Nassiopoulou, A., Hourdakis, E., Sarafis, P., Ferrari, P., Issa, H., Raskin, J.-P., Roda Neuf, C., Ali, K.B.
Maintainer CCSD
Last Updated May 5, 2026, 10:36 (UTC)
Created May 5, 2026, 10:36 (UTC)
Identifier hal-00994478
Language en
contributor Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC) ; Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)
coverage Warwick, United Kingdom
creator G Nassiopoulou, A.
date 2013-03-19T00:00:00
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harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2025-09-27T00:00:00
set_spec type:COMM