Modeling and fabrication of piezoelectric aluminium nitride resonator and its application in oscillators
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | Solid-State Sensors, Actuators and Microsystems Conference |
| Author | Mareschal, Olivier, Loiseau, Sebastien, Verjus, Fabrice, Valbin, Laurie, Lissorgues, Gaelle, Bazin, Bouregba, R., Poullain, G., Saez, Sébastien, Dolabdjian, Christophe |
| Maintainer | CCSD |
| Last Updated | May 5, 2026, 11:33 (UTC) |
| Created | May 5, 2026, 11:33 (UTC) |
| Identifier | hal-00989687 |
| Language | en |
| Rights | https://about.hal.science/hal-authorisation-v1/ |
| contributor | Electronique, Systèmes de communication et Microsystèmes (ESYCOM) ; Conservatoire National des Arts et Métiers [Cnam] (Cnam)-Université Paris-Est Marne-la-Vallée (UPEM)-ESIEE Paris |
| coverage | Denver, United States |
| creator | Mareschal, Olivier |
| date | 2009-05-05T00:00:00 |
| harvest_object_id | c2d942f9-19e6-4d9f-9add-38002bc70c7c |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-04-15T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1109/SENSOR.2009.5285387 |
| set_spec | type:COMM |