Micro-fluidic channel integration on thick-SOI LSI device for cells analyses
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | Sensor Symposium 2013 |
| Author | Tixier, Agnes, Mori, Isao, Takahashi, T., Français, Olivier, Le Pioufle, Bruno, Mita, Yoshio, Renseigné, Non |
| Maintainer | CCSD |
| Last Updated | May 5, 2026, 12:10 (UTC) |
| Created | May 5, 2026, 12:10 (UTC) |
| Identifier | hal-00987092 |
| Language | en |
| contributor | Laboratory for Integrated Micro Mechatronics Systems (LIMMS) ; The University of Tokyo (UTokyo)-Centre National de la Recherche Scientifique (CNRS) |
| coverage | Sendaï, Japan |
| creator | Tixier, Agnes |
| date | 2013-11-05T00:00:00 |
| harvest_object_id | 06433ef1-e092-4342-97b1-186edb185334 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-02-02T00:00:00 |
| set_spec | type:COMM |