Tunable RF MEMS and Its Applications
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | Conference CSTIC 2014 |
| Author | Liu, Zewen, Liu, Huiliang, Sarrazin, Julien |
| Maintainer | CCSD |
| Last Updated | May 5, 2026, 12:42 (UTC) |
| Created | May 5, 2026, 12:42 (UTC) |
| Identifier | hal-00985064 |
| Language | en |
| Rights | https://about.hal.science/hal-authorisation-v1/ |
| contributor | Institute of Microelectronics [Beijing] (IMETU) ; Qing hua da xue = Tsinghua University = Université Tsinghoua [Beijing] (THU) |
| coverage | Shanghai, China |
| creator | Liu, Zewen |
| date | 2014-03-16T00:00:00 |
| harvest_object_id | 51c6e35e-ef49-45e8-8234-cba6a5cc8f6e |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-03-11T00:00:00 |
| set_spec | type:COMM |