X-ray reflectometry study of diamond-like carbon films prepared by plasma enhanced chemical vapor deposition in a low pressure inductively coupled plasma
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0040-6090 |
| Author | Salah, F., Harzallah, B., van Der Lee, A., Angleraud, Benoit, Begou, T., Granier, Agnès, A. |
| Maintainer | CCSD |
| Last Updated | May 5, 2026, 13:35 (UTC) |
| Created | May 5, 2026, 13:35 (UTC) |
| Identifier | hal-00982226 |
| Language | en |
| contributor | Laboratoire Physico-Chimie des Matériaux [Monastir] ; Faculté des Sciences de Monastir (FSM) ; Université de Monastir - University of Monastir - جامعة المنستير (UM)-Université de Monastir - University of Monastir - جامعة المنستير (UM) |
| creator | Salah, F. |
| date | 2013-05-05T00:00:00 |
| harvest_object_id | 860773f0-22c8-4e75-8966-57a1cc4a30a8 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-01-12T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1016/j.tsf.2013.04.033 |
| set_spec | type:ART |
