X-ray reflectometry study of diamond-like carbon films prepared by plasma enhanced chemical vapor deposition in a low pressure inductively coupled plasma

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Source ISSN: 0040-6090
Author Salah, F., Harzallah, B., van Der Lee, A., Angleraud, Benoit, Begou, T., Granier, Agnès, A.
Maintainer CCSD
Last Updated May 5, 2026, 13:35 (UTC)
Created May 5, 2026, 13:35 (UTC)
Identifier hal-00982226
Language en
contributor Laboratoire Physico-Chimie des Matériaux [Monastir] ; Faculté des Sciences de Monastir (FSM) ; Université de Monastir - University of Monastir - جامعة المنستير (UM)-Université de Monastir - University of Monastir - جامعة المنستير (UM)
creator Salah, F.
date 2013-05-05T00:00:00
harvest_object_id 860773f0-22c8-4e75-8966-57a1cc4a30a8
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2026-01-12T00:00:00
relation info:eu-repo/semantics/altIdentifier/doi/10.1016/j.tsf.2013.04.033
set_spec type:ART