MEMS de Piano - an Experimental Course of Design, Fabrication, and Testing of MEMS Oscillator
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | Proc. of EWME |
| Author | Mita, Y., Kubota, M., Denoual, Matthieu, Lebrasseur, E., Sawamura, T. |
| Maintainer | CCSD |
| Last Updated | May 5, 2026, 13:37 (UTC) |
| Created | May 5, 2026, 13:37 (UTC) |
| Identifier | hal-00982149 |
| Language | en |
| contributor | The University of Tokyo (UTokyo) |
| coverage | Tallinn, Estonia |
| creator | Mita, Y. |
| date | 2014-05-05T00:00:00 |
| harvest_object_id | c6d67980-5905-4cc7-a44e-b6468f4e6cbb |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-02-02T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1109/EWME.2014.6877420 |
| set_spec | type:COMM |