Comparison of CrAlN layers obtained with one (CrAl) or two targets (Cr and Al) by magnetron sputtering

The authors would like to thank the Regional Council of Burgundy, France for its funding and Michael Walock for his help in English revisions

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Field Value
Source ISSN: 0040-6090
Author Nouveau, Corinne, Tlili, Brahim, Aknouche, Hamid, Benlatreche, Yacine, Patel, Bhavesh
Maintainer CCSD
Last Updated May 5, 2026, 14:07 (UTC)
Created May 5, 2026, 14:07 (UTC)
Identifier hal-00980692
Language en
Rights https://about.hal.science/hal-authorisation-v1/
contributor Laboratoire Bourguignon des Matériaux et Procédés (LABOMAP) ; Arts et Métiers Sciences et Technologies
creator Nouveau, Corinne
date 2012-01-31T00:00:00
harvest_object_id 96d35d76-4211-465a-a8e1-18f77b3d2283
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2026-04-13T00:00:00
relation info:eu-repo/semantics/altIdentifier/doi/10.1016/j.tsf.2011.11.049
set_spec type:ART