Polycrystalline silicon nanowires synthesis compatible with CMOS technology for integrated gas sensing applications
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0018-9383 |
| Author | Rogel, Régis, Jacques, Emmanuel, Pichon, Laurent, Salaün, Anne-Claire |
| Maintainer | CCSD |
| Last Updated | May 6, 2026, 03:12 (UTC) |
| Created | May 6, 2026, 03:12 (UTC) |
| Identifier | hal-00956209 |
| Language | en |
| Rights | https://about.hal.science/hal-authorisation-v1/ |
| contributor | Institut d'Électronique et des Technologies du numéRique (IETR) ; Université de Nantes (UN)-Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes) ; Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS) |
| creator | Rogel, Régis |
| date | 2014-02-01T00:00:00 |
| harvest_object_id | dfa6b567-0522-4ae3-b353-b4aaaf20098c |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2023-03-24T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1109/TED.2013.2295511 |
| set_spec | type:ART |