(PE)ALD TaCN film nucleation and growth on TiNx: influence of nitrogen content
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | 25th International Conference on Amorphous and Nano-crystalline Semiconductors, ICANS25 |
| Author | Piallat, F., Gassilloud, R., Pelissier, B., Leroux, Cédric, Caubet, P., Vallée, Corentin |
| Maintainer | CCSD |
| Last Updated | May 6, 2026, 07:21 (UTC) |
| Created | May 6, 2026, 07:21 (UTC) |
| Identifier | hal-00949998 |
| Language | en |
| contributor | Laboratoire des technologies de la microélectronique (LTM) ; Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS) |
| coverage | Toronto, Canada |
| creator | Piallat, F. |
| date | 2013-08-18T00:00:00 |
| harvest_object_id | 2a8078e9-0d41-4486-a821-df9292ee7f3d |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-09-27T00:00:00 |
| set_spec | type:COMM |