Thermal deposition of titanium nitride by MOCVD using Ti(Net2)4
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | EuroCVD conference |
| Author | Jimenez, Chloé, Joubert, M., Piallat, F., Gassilloud, R., Michallon, P., Pelissier, B., Lachaud, C., M. Decams, J. |
| Maintainer | CCSD |
| Last Updated | May 6, 2026, 07:21 (UTC) |
| Created | May 6, 2026, 07:21 (UTC) |
| Identifier | hal-00949996 |
| Language | en |
| contributor | Laboratoire des technologies de la microélectronique (LTM) ; Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS) |
| coverage | Varna, Bulgaria |
| creator | Jimenez, Chloé |
| date | 2013-09-01T00:00:00 |
| harvest_object_id | 58657da2-785a-4d7b-9740-8c25ff17c3a1 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-09-27T00:00:00 |
| set_spec | type:COMM |