LNE Activies in Nanometrology: flatness reference calibration algorithm
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | 8th euspen International Conference |
| Author | Lahousse, Ludovic, Boriptkosol, Siriwan, Leleu, Stéphane, David, Jean-Marie, Ducourtieux, Sébastien, Coorevits, Thierry, Gibaru, Olivier |
| Maintainer | CCSD |
| Last Updated | May 6, 2026, 08:42 (UTC) |
| Created | May 6, 2026, 08:42 (UTC) |
| Identifier | hal-00948037 |
| Language | en |
| Rights | https://about.hal.science/hal-authorisation-v1/ |
| contributor | Laboratoire National de Métrologie et d'Essais [Trappes] (LNE) |
| creator | Lahousse, Ludovic |
| date | 2008-05-06T00:00:00 |
| harvest_object_id | 6606b628-17c7-45bd-a3f5-f8605744aaf4 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-04-13T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/hdl/http://hdl.handle.net/10985/7755 |
| set_spec | type:COMM |