Hyperbranched Polymers for Photolithographic Applications - Towards Understanding the Relationship between Chemical Structure of Polymer Resin and Lithographic Performances
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0935-9648 |
| Author | Chochos, Christos L., Ismailova, Esma, Brochon, Cyril, Leclerc, Nicolas, Tiron, Raluca, Sourd, Claire, Bandelier, Philippe, Foucher, Johann, Ridaoui, Hassan, Dirani, Ali, Soppera, Olivier, Perret, Damien, Brault, Christophe, Serra, Christophe, Hadziioannou, Georges |
| Maintainer | CCSD |
| Last Updated | May 6, 2026, 19:09 (UTC) |
| Created | May 6, 2026, 19:09 (UTC) |
| Identifier | hal-00945178 |
| Language | en |
| contributor | École Européene de Chimie, Polymères et Matériaux [Strasbourg] (ECPM) ; Université de Strasbourg (UNISTRA) |
| creator | Chochos, Christos L. |
| date | 2009-03-20T00:00:00 |
| harvest_object_id | c577d6e2-32ed-4e10-a09a-4e77a537b851 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-11-24T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1002/adma.200801715 |
| set_spec | type:ART |