Is actinometry reliable for monitoring Si and silicone halides produced in silicon etching plasmas?: A comparison with their absolute densities measured by UV broad band absorption
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 1286-0042 |
| Author | Kogelschatz, M., Cunge, G., Sadeghi, N. |
| Maintainer | CCSD |
| Last Updated | May 6, 2026, 20:59 (UTC) |
| Created | May 6, 2026, 20:59 (UTC) |
| Identifier | hal-00944897 |
| Language | en |
| contributor | Laboratoire des technologies de la microélectronique (LTM) ; Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Kogelschatz, M. |
| date | 2006-05-06T00:00:00 |
| harvest_object_id | 24c8a9a2-eb53-4837-b463-f2c65013af05 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-09-27T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1051/epjap:2006021 |
| set_spec | type:ART |