A method for dynamic parameterized shape reconstruction. Application to scatterometry
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication. EIPBN |
| Author | Soulan, S., Schiavone, P., Besacier, M., El Kodadi, M. |
| Maintainer | CCSD |
| Last Updated | May 7, 2026, 00:41 (UTC) |
| Created | May 7, 2026, 00:41 (UTC) |
| Identifier | hal-00944243 |
| Language | en |
| contributor | Laboratoire des technologies de la microélectronique (LTM) ; Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS) |
| coverage | Nashville, United States |
| creator | Soulan, S. |
| date | 2013-05-28T00:00:00 |
| harvest_object_id | 165112be-a6b2-4dde-a7eb-2fd89311a835 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-09-27T00:00:00 |
| set_spec | type:COMM |