Single step fabrication of hybrid double clamped resonator by microfluidic
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | PiezoNEMS Workshop |
| Author | Thuau, Damien, Laval, C., Salmon, Jean-Baptiste, Ayela, Cédric, Dufour, Isabelle, Poulin, Philippe |
| Maintainer | CCSD |
| Last Updated | May 7, 2026, 08:33 (UTC) |
| Created | May 7, 2026, 08:33 (UTC) |
| Identifier | hal-00933250 |
| Language | en |
| contributor | Laboratoire de l'intégration, du matériau au système (IMS) ; Université de Bordeaux (UB)-Institut Polytechnique de Bordeaux-Centre National de la Recherche Scientifique (CNRS) |
| coverage | Grenoble, France |
| creator | Thuau, Damien |
| date | 2013-05-07T00:00:00 |
| harvest_object_id | 100595f5-f247-4ccc-ae1d-e0dc67a1a218 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-11-23T00:00:00 |
| set_spec | type:COMM |