Metallic coatings of MEMS at low temperatures: stress, elasticity and non-linear dissipation
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0021-8979 |
| Author | Collin, Eddy, Kofler, Johannes, Lakhloufi, Sabine, Pairis, Sébastien, Bunkov, Yuriy M., Godfrin, Henri |
| Maintainer | CCSD |
| Last Updated | May 7, 2026, 19:06 (UTC) |
| Created | May 7, 2026, 19:06 (UTC) |
| Identifier | hal-00919321 |
| Language | en |
| Rights | https://about.hal.science/hal-authorisation-v1/ |
| contributor | Ultra-basses températures (NEEL - UBT) ; Institut Néel (NEEL) ; Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Collin, Eddy |
| date | 2010-05-07T00:00:00 |
| harvest_object_id | 0eb3353e-2f8c-4f57-ab4f-968ba8ab077d |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-09-27T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/arxiv/1312.4501 |
| set_spec | type:ART |